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Chemical reactions of electroless etching

 
 
spyker
 
Reply Wed 1 Oct, 2014 08:16 pm
Hello everyone,

I have a question regarding to the chemical reactions between gallium nitride (GaN) wafer and other chemicals. FYI, i'm doing elctroless etching to fabricate porous GaN. To be honest, chemistry is not my field. So I have some difficulties to solve this chemical reactions. Could anyone can help me to solve this chemical reactions?

GaN + HF + C2H5OH +H2O2 = ???

Thanks!
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Type: Question • Score: 2 • Views: 1,132 • Replies: 6
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farmerman
 
  1  
Reply Thu 2 Oct, 2014 04:31 pm
@spyker,
Hshimoto M. has, in 2005 published several papers on LED manufacture with deposition of GaN. Im not aware of the part that the alcohol nd peroxide mix plays (except making n epoxide ?) since its usually a 3 or 4 prt process where the HF is used to dissolve the remaining Silica from your substrate.


Germlat
 
  0  
Reply Thu 2 Oct, 2014 05:30 pm
@spyker,
You don't have any business working Chemistry if you don't understand it.
farmerman
 
  1  
Reply Thu 2 Oct, 2014 07:11 pm
@Germlat,
sounds more like an art project , but if hes ******* with HF might I say that this acid is one of the most dangerous of the ones we use in industry
Germlat
 
  1  
Reply Thu 2 Oct, 2014 07:18 pm
@farmerman,
Echo...among other things.
0 Replies
 
spyker
 
  1  
Reply Fri 3 Oct, 2014 12:48 am
@farmerman,
FYI, i'm doing etching process to fabricate porous on the surface of GaN. Before, I'm doing etching process to fabricate porous silicon. Yes, the HF is used to dissolve the surface of the the silicon while the alcohol and peroxide are used for reducing bubble formation and smoothing the sidewalls of the porous structure, respectively. I already get the chemical reactions between silicon and the solution. However, for GaN sample its quite challenging since there are two element involve (Ga & N) in this reactions.
farmerman
 
  1  
Reply Fri 3 Oct, 2014 04:32 am
@spyker,
would you start the dep of the GaN by uing a Gallium Azide? Im just kibitzing here Ive never messed with gallium anything except in its separation with Iridium. (All my past RE work has been with ores and slags).
Are you making colored light LED signs?
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